Lam tcp 9600
TīmeklisTCP 9600 family Key Applications Conductor etch Dielectric etch Metal etch Etch of specialty films (lead zirconate titanate [PZT], GaN, AIGaN, SiC, etc.) Deep silicon … Lam-Kapital; Umwelt, Soziales und Governance > Umwelt, Gesundheit & … The interconnect makes up the intricate wiring that connects the billions of … Packaging strategies generate multiple challenges for the processing steps … These bevel clean systems remove unwanted materials from the wafer’s … TīmeklisLampoly is a Transformer Coupled Plasma (TCP) etcher, generates a uniform, high density plasma for selective etching of silicon and polysilicon. It has two independent 13.56 MHz RF power supplies which deliver high and low power to the upper and lower electrodes, respectively. A high density discharge is generated by the higher-power …
Lam tcp 9600
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TīmeklisDownload LAM Research TCP 9600 PTX Configurations Click Photos to Enlarge Lam Research features the following: 2 chambers one of which is for Al etching and the other for microwave stripping. Features A6 platform. Envision software and E chuck. System configured for 8" wafers. http://en.cycas.com/m/product/212.html
Tīmeklis2024. gada 27. sept. · The LAM 9400 SE is a high density plasma etch tool manufactured by LAM Research Corporation. This tool was originally designed for production polysiliconetching, but has been reconfigured for siliconbased materials, III‐Vs, some metals, and organic materials. Tīmeklis• Equipment Platform – Lam Research TCP-9600 • Process – Metal Etch & Resist Strip/Ash • Process Chemistry – Cl 2, BCl 3, Water Vapor • Cleaning Chemistry – O 2 plasma (cleans ash deposits after every wafer) • Seal Location – custom seal for slit valve opening . Case Report # 6302 - PM Cycle Extended 3X! ...
http://www.iciequipment.com/buy/lam-model-9600s-4400 Tīmeklis2024. gada 26. nov. · Other machines similar to LAM TCP 9600SE. 1 HIghmax UV-200 UV Curing System. Location : AMERICA North (USA-Canada-Mexico) 1 Karl Suss …
TīmeklisTHE METAL ETCH PROCESS There are several steps in the manufacture of semiconductors. This project focused on an Al-stack etch process performed on the commercially available Lam 9600 plasma etch tool. The goal of this process is to etch the TiN/Al - 0.5% Cu/TiN/oxide stack with an inductively coupled BCl 3/Cl 2plasma.
TīmeklisDescription. LAM TCP9600. LAM RESEARCH 9600 Etcher, 8″, Turbo upgraded, TAC Type, VAT Valves & Controllers. Please contact us if you are interested in the LAM TCP9600. We do not own the items. These items are only for end user. They are subject to prior sales without notice. First come, first serviced. Appreciate your time. brian\\u0027s grillTīmeklisLam Research TCP 9600 The Rainbow TCP 9600 Standalone System is a single wafer, vacuum load-locked low pressure metal etch system. Semigroup Equipment Sales … brian\\u0027s goalie padstank logistikTīmeklisDescription: The LamTCP 9600SE is intended to etch aluminum metal and TiW layers with highly vertical sidewalls suitable for 0.35 um line width. The plasma is a medium … brian\u0027s hdTīmeklisLAM TCP 9600 SE LAM TCP 9600 SE II Rainbows are a common workhorse machine and have lost much of their supportability over time. We know them well. LAM … tank must small vs largeTīmeklisDownload LAM Research TCP 9600 PTX Configurations. Click Photos to Enlarge. Lam Research features the following: 2 chambers one of which is for Al etching and. the … brian\\u0027s hdTīmeklisLAM Alliance TCP 9600 DSiE PROCESS MODULES (PM) LAM Alliance TCP 9400 DFM PROCESS MODULES (PM) LAM Alliance TCP 9600 DFM PROCESS … tankmpk02 millipore